简介

RBF-580 复合真空计由两个独立的测量系统(热阴极电离规和皮拉尼规)组成，测量信号以压力的对数形式输出。热阴极电离(由皮拉尼控制)仅在压力<2.4×10^-2mbar 下被激活，在2.0×10 ^-2 ...5.5×10 ^-3mbar 的重叠压力范围内，输出两个测量系统的混合信号；当压力超过开关阈值（3.2×10 ^-2mbar ），则关闭热阴极并输出皮拉尼测量值。

 The RBF-580 compound vacuum gauge consists of two independent measuring systems (hot cathode ionization gauge and Pirani gauge) and the measurement signal is output in logarithmic form of pressure.The hot cathode ionization (controlled by Pirani) is activated only at pressures < 2.4 × 10 -2 mbar and outputs a mixed signal of the two measuring systems in the overlapping pressure range of 2.0 × 10 -2 . .5.5 × 10 -3 mbar overlapping pressure range, the mixed signal of the two measurement systems is output; when the pressure exceeds the switching threshold (3.2 × 10 -2 mbar ), the hot cathode is switched off and the Pirani measurements are output.

优点

• 从 5 x 10-10 mbar 至大气气压（8 x 10-10 Torr 至大气气压）的极其宽泛的测量范围

Extremely wide measurement range from 5 x 10-10 mbar to atmospheric pressure (3.8 x 10-10 Torr to atmospheric pressure)

• 无需零点校准，零点校准在仪表运行过程中自动进行，不需要手动校准

 No need to zero calibration, zero calibration is performed automatically during instrument operation and does not require manual calibration    

• 传感器配备了两个相同的热阴极灯丝，如果灯丝断裂，仪表将立即反应并切换到第二根(未损坏)灯丝。
• 有三个单极单掷（常开）继电器，可以配置为任何一个电压输出或配置为接地连接，具体取决于系统控制器的需要。

The sensor is equipped with two identical hot cathode filaments, and if the filament breaks, the meter will react immediately and switch to the second (undamaged) filament.

• 测量性能不受安装方向的影响，实现工具设计的最大工程自由度

Measurement performance is independent of mounting orientation for maximum engineering freedom in tool design

应用范围：

• 用于 5×10 ^-10mbar…1000 mbar 的压力范围内气体的真空测量

Vacuum measurement for gases in the pressure range 5 x 10 -10 mbar...1000 mbar

• 对半导体过程和传输腔室的压力测量

Pressure measurement of semiconductor processes and transfer chambers

• 工业镀膜

Industrial Coating