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RBM-350送器属于高精度型变送器，在苛刻的生产环境中具有稳定的性能。
该变送器封装在坚固耐用小型管壳内。坚固耐用的传感单元更适用于半导体系统,以及常规用途如前级真空管道中。该变送器中单独传感器部件可以更换 。
该压阻电阻复合绝对压力变送器在同一管体上，集成安装了压阻规、电阻规两种压力检测传感器，对同一检测腔体的压力进行检测。
通过自动切换，充分发挥各自优点，实现0.5Pa～1.0×105Pa整个范围的准确测量，且1.0×103～1.0×105Pa之间的测量气体成分无关。摒弃各自缺点；不仅拓展了测量范围，也足以保证测量值的准确、稳定。
简介
RBF-580 复合真空计由两个独立的测量系统(热阴极电离规和皮拉尼规)组成，测量信号以压力的对数形式输出。热阴极电离(由皮拉尼控制)仅在压力<2.4×10-2mbar 下被激活，在2.0×10 -2 ...5.5×10 -3mbar 的重叠压力范围内，输出两个测量系统的混合信号；当压力超过开关阈值（3.2×10 -2mbar ），则关闭热阴极并输出皮拉尼测量值。
The RBF-580 compound vacuum gauge consists of two independent measuring systems (hot cathode ionization gauge and Pirani gauge) and the measurement signal is output in logarithmic form of pressure.The hot cathode ionization (controlled by Pirani) is activated only at pressures < 2.4 × 10 -2 mbar and outputs a mixed signal of the two measuring systems in the overlapping pressure range of 2.0 × 10 -2 . .5.5 × 10 -3 mbar overlapping pressure range, the mixed signal of the two measurement systems is output; when the pressure exceeds the switching threshold (3.2 × 10 -2 mbar ), the hot cathode is switched off and the Pirani measurements are output.
优点
- 从 5 x 10-10 mbar 至大气气压（8 x 10-10 Torr 至大气气压）的极其宽泛的测量范围
Extremely wide measurement range from 5 x 10-10 mbar to atmospheric pressure (3.8 x 10-10 Torr to atmospheric pressure)
- 无需零点校准，零点校准在仪表运行过程中自动进行，不需要手动校准
No need to zero calibration, zero calibration is performed automatically during instrument operation and does not require manual calibration
- 传感器配备了两个相同的热阴极灯丝，如果灯丝断裂，仪表将立即反应并切换到第二根(未损坏)灯丝。
- 有三个单极单掷（常开）继电器，可以配置为任何一个电压输出或配置为接地连接，具体取决于系统控制器的需要。
The sensor is equipped with two identical hot cathode filaments, and if the filament breaks, the meter will react immediately and switch to the second (undamaged) filament.
- 测量性能不受安装方向的影响，实现工具设计的最大工程自由度
Measurement performance is independent of mounting orientation for maximum engineering freedom in tool design
应用范围：
- 用于 5×10 -10mbar…1000 mbar 的压力范围内气体的真空测量
Vacuum measurement for gases in the pressure range 5 x 10 -10 mbar...1000 mbar
- 对半导体过程和传输腔室的压力测量
Pressure measurement of semiconductor processes and transfer chambers
- 工业镀膜
Industrial Coating
简介
RBF-570设计用于1×10-9 mbar…1000 mbar压力范围内气体的真空测量,该量规由两个独立的测量系统组成（Pirani和冷阴极系统（基于反向磁控管原理））。冷阴极测量电路由Pirani电路控制，在压力P<1×10-3mbar时激活。若冷阴极测量电路未被点燃，则输出皮拉尼的测量值作为测量信号。在整个测量范围内，测量信号作为压力的对数输出。
The RBF-570 is designed for vacuum measurement of gases in the pressure range 1 x 10-9 mbar...1000 mbar and consists of two independent measuring systems (Pirani and cold cathode system (based on the reverse magnetron principle)).The cold cathode measurement circuit is controlled by the Pirani circuit and is activated at pressures P < 1 x 10-3 mbar. If the cold cathode measurement circuit is not fired, the measured value of the Pirani is output as a measurement signal. The measurement signal is output as the logarithm of the pressure over the entire measurement range.
优点
- 双独立测量系统，组成最佳测量配置
Dual independent measuring systems for optimal measurement configurations
- 从 0x 10-9mbar 至大气气压（3.8 x 10-10 Torr 至大气气压）的极其宽泛的测量范围
Extremely wide measuring range from 1.0x 10-9 mbar to atmospheric pressure (3.8 x 10-10 Torr to atmospheric pressure)
- 在1E-8 … 1E2 mbar 5% 工艺压力范围内为表现出优秀的重复性
Excellent repeatability in the process pressure range of 1 E-8 ... 1E2 mbar 5%.
- 测量性能不受安装方向的影响，实现工具设计的最大工程自由度
Measurement performance is independent of mounting orientation for maximum engineering freedom in tool design
简介
该系列产品将皮拉尼技术与陶瓷电容膜片传感器的优点结合在单一产品中，测量范围为 5.0 x 10-5～1500mbar。在 30mbar至1500mbar的测量范围内，电容膜片技术不受气体类型限制，能够提供高精度可靠压力测量值。
The Reborn Pirani Capacitance Diaphragm Gauge (RBF-530) combines the Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product. In the measurement range between 5.0 x 10-5 mbar and 1500mbar the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.
优点
- 在 30mbar至大气压力下不受气体类型限制，具有较高测量精度
Gas-type independent above 30 mbar with high measurement accuracy
- 快速的大气检测，消除了等待时间并缩短了工艺周期
Fast atmospheric detection – eliminates waiting time and shortens process cycle
- 提供钨丝或全陶瓷涂层传感器单元，适合高腐蚀性应用
Available with tungsten or with a fully ceramic coated sensor unit for highly corrosive applications
- 可选的输出信号，易于集成
Selectable output signal for easy integration
- 可选大气开关、显示屏和数字接口等
Optional atmospheric switch, display and digital interfaces
- 测量性能不受安装方向的影响，实现工具设计的最大工程自由度
Measurement performance is independent of mounting orientation for maximum engineering freedom in tool design
应用范围：
- 预抽真空室控制
Load lock control
- 真空压力测量
For vacuum pressure measurement
- 真空系统中的安全电路
Safety circuits in vacuum systems
- 中低真空范围内的一般真空测量与控制等
General vacuum measurement and control in the medium and rough vacuum range
